How do I cross-reference a MKS Instruments valve?
Start with the source model, open its dedicated equivalent page, then verify connection, pressure, material, and actuation before sourcing a replacement.
Brand bridge
Use this page to move from brand-level demand into actual equivalent valve lookups. Start with popular MKS Instruments models below, then validate family coverage and open the dedicated cross-reference page for the specific part you need to replace.
Start with the source model, open its dedicated equivalent page, then verify connection, pressure, material, and actuation before sourcing a replacement.
Not always. ValveXRef surfaces likely alternatives, but fit, pressure class, and control method still need to be confirmed on the specification page.
Use the brand page when you only know the manufacturer or family. Use the model-level cross-reference page when you already have a specific part number.

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MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE

MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE

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MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE

MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE

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MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE

MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE

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MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE

MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE

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MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE

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MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE

MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE

Integrated20upstream202620downstream20pressure20controllers / PPCA20HIGH20PERFORMANCE20PRESSURE20CONTROL20VALVE20WITH20INTEGRATED20CONTROLLER

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MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE

MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE

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MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE

MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE

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MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE

MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE

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MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE

MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE

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MASS20FLOW20CONTROLLERS / C Series20compact2c20ultrafast20mass20flow20controllers / CMA10B2015 142c00020sccm20compact2c20fast20response20mass20flow20controller