How do I cross-reference a MKS Instruments valve?
Start with the source model, open its dedicated equivalent page, then verify connection, pressure, material, and actuation before sourcing a replacement.
Brand bridge
MKS Instruments Valve Cross Reference
Use this page to move from brand-level demand into actual equivalent valve lookups. Start with popular MKS Instruments models below, then validate family coverage and open the dedicated cross-reference page for the specific part you need to replace.
798 valve modelsOpen generic xref hub
MKS Instruments cross-reference FAQ
Are MKS Instruments valve equivalents dimensionally identical?
Not always. ValveXRef surfaces likely alternatives, but fit, pressure class, and control method still need to be confirmed on the specification page.
When should I use the brand page instead of a model page?
Use the brand page when you only know the manufacturer or family. Use the model-level cross-reference page when you already have a specific part number.
MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
2XCUTR6NS
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MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
W78AU3V7V
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MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
O19OZ6C17
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MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
XDU398NBZ
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MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
QLB2OSBPQ
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MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
5VYK8V5T6
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MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
TTCPLD7SJ
1 รุ่นเรียกดู ->
Integrated20upstream202620downstream20pressure20controllers / PPCA20HIGH20PERFORMANCE20PRESSURE20CONTROL20VALVE20WITH20INTEGRATED20CONTROLLER
Q3LDQLKC4
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MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
2WXBHQR4O
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MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
UZRCY0U29
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MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
SKCLNE34O
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MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
2BGIKMJGL
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MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
6NGIY4E2R
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MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
YNAH6ZFLT
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MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
DR38PKF6O
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MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
JCJAXFX5G
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MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
R81ZS63F8
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MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
14B4WG2CR
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MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
HNI63SJNG
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MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
G63GG49RQ
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MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
K6KTBGCKE
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MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
JDDS691DB
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MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
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MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
NPNLURNZ5
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MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
YKFECLLE2
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MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
R47M3JBVT
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MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
KC6G394JQ
1 รุ่นเรียกดู ->
MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
D66RPC6ZA
1 รุ่นเรียกดู ->
MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
8NHFUOHEH
1 รุ่นเรียกดู ->
MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
A7RXQQZFW
1 รุ่นเรียกดู ->
MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
KC0DDTQCO
1 รุ่นเรียกดู ->
MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
VG5DOXU2T
1 รุ่นเรียกดู ->
MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
8KAY1F8KQ
1 รุ่นเรียกดู ->
MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
3RQJ8LZVS
1 รุ่นเรียกดู ->
MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
D2YZ6U1S4
1 รุ่นเรียกดู ->
MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
NTO730FU1
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MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
MVYX0UUOQ
1 รุ่นเรียกดู ->
MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
UXHCTC2NM
1 รุ่นเรียกดู ->
MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
WVWL7CFE5
1 รุ่นเรียกดู ->
Integrated20upstream202620downstream20pressure20controllers / PPCA20HIGH20PERFORMANCE20PRESSURE20CONTROL20VALVE20WITH20INTEGRATED20CONTROLLER
UC2O1W99K
1 รุ่นเรียกดู ->
MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
T6IYTVII8
1 รุ่นเรียกดู ->
MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
TKTJ5FUNO
1 รุ่นเรียกดู ->
MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
OJBD41592
1 รุ่นเรียกดู ->
MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
2ZDQI45PU
1 รุ่นเรียกดู ->
MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
02R70WTHB
1 รุ่นเรียกดู ->
MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
E9LQVTIGL
1 รุ่นเรียกดู ->
MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
XTRJBLHW7
1 รุ่นเรียกดู ->
MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
M2RH01JXH
1 รุ่นเรียกดู ->
MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
E085GGCRJ
1 รุ่นเรียกดู ->
MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
6BJ3B8BGW
1 รุ่นเรียกดู ->
MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
HWB9PCBJZ
1 รุ่นเรียกดู ->
MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
DI5D4E0T8
1 รุ่นเรียกดู ->
MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
BMU9MIJBA
1 รุ่นเรียกดู ->
MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
98IVQ6AFK
1 รุ่นเรียกดู ->
MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
KDIAVSORF
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MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
NKTBQHEJJ
1 รุ่นเรียกดู ->
MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
UI18GP7VH
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MASS20FLOW20CONTROLLERS / G Series20fast20and20repeatable20mass20flow20controllers / GV50A20ELASTOMER20SEALED205 502c00020sccm20mass20flow20controllers20with20shut OFF20VALVE
MX1LF2P60
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FLOW20RATIO20CONTROLLERS / Delta20ii202 ZONE20FLOW20RATIO20CONTROLLER
WDDWADKCQ
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MASS20FLOW20CONTROLLERS / C Series20compact2c20ultrafast20mass20flow20controllers / CMA10B2015 142c00020sccm20compact2c20fast20response20mass20flow20controller
MDD09LVEX
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